Equipment Type:

Cleanroom Instrumentation

Metrology

Microscopy/Surface Analysis

Information the Equipment Can Provide

The Zygo interferometer is a laser-based tool to measure large area topography of flat samples.  The system allows for rapid scanning of up to 6″ diameter samples at the lowest resolution. The He:Ne laser allows for the measurement of height changes of up to 632 nm over small distance.

Features

• Rapid, noninvasive, large-area, topographical measurements of flat substrates
• 120-micron lateral resolution at the lowest magnification, 20-micron resolution at the highest magnification

Fees and Policies

• UT Users: $31/hour
• Higher Education/State Agencies: $54/hour
• Corporate/External Users: $46/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.