Equipment Type:

Microscopy/Surface Analysis

Surface Analysis

Instrument Capabilities

The VersaProbe 4 XPS is a highly versatile and automated multi-technique surface analysis system equipped with a monochromatic, micro-focused X-ray source and a 180° hemispherical electron energy analyzer. The system is optimized for high-sensitivity, spatially resolved chemical-state analysis and provides excellent micro-area spectroscopy with adjustable spot sizes from 7 to 300 µm.

Key features:

• Micro-focused monochromatic X-ray source with adjustable spot sizes from 7–300 µm.
• Al and Zn/Mg X-ray sources, with the Zn/Mg source providing up to 600 W.
• Argon ion cluster gun, operating from 2.5–20 kV, for surface cleaning and depth profiling.
• Ultraviolet Photoelectron Spectroscopy (UPS) for electronic structure and valence-band analysis.
• Reflection Electron Energy-Loss Spectroscopy (REELS) for characterization of electronic excitations and surface properties.
• Auger Electron Spectroscopy (AES) for high-resolution surface imaging and chemical analysis, with a beam diameter down to approximately 150 nm.
• Heating/cooling stage with a temperature range of approximately −140°C to 800°C.
• Depth resolution: approximately 2–8 nm.
• Lateral resolution: approximately 10 µm for XPS micro-area analysis.

The combination of XPS, AES, UPS, REELS, ion-beam depth profiling, and variable-temperature analysis enables comprehensive investigation of surface chemistry, chemical states, electronic structure, thin films, interfaces, coatings, and depth-dependent composition.

Fees and Policies

• UT Users: $60/hour
• Higher Education/State Agencies: $212/hour
• Corporate/External Users: $293/hour

Training

Users should register for the required in-person training course through UTLearn.

TMI: Basic training on the VersaProbe 4 XPS
TMI: Basic training on electron spectroscopic techniques on the VersaProbe 4