Equipment Type:

Microscopy/Surface Analysis

Surface Analysis

Instrument Capabilities

The M6 is an ultra-high-resolution mass spectrometer capable of mass resolution down to 0.001 a.m.u. It provides comprehensive chemical composition analysis of both surfaces and bulk materials, with a mass range extending up to 14,000 a.m.u. The instrument offers elemental sensitivity at concentrations as low as parts-per-billion (ppb), while its surface-sensitive capabilities enable analysis of the outermost few atomic layers of a material.

Key features:

• Surface Spectroscopy:
  • elemental and molecular ppb sensitivity
  • < 1 nm surface sensitivity
  • >30,000 mass resolution (m/δm)
  • mass range up 14000 a.m.u.
• Surface Imaging:
  • lateral resolution < 50 nm
  • parallel mass detection
• Depth Profiling:
  • depth resolution < 1 nm
  • thin films from < 1 nm to few hundreds μm
  • atomic mixing at buried interfaces
• 3D Analysis:
  • high depth resolution
  • high lateral resolution
  • parallel mass detection
• Liquid Metal Ion Gun (LMIG)
  • Bi_n^m+ source for analysis
  • < few pA beam current – static SIMS limit
  • 30 keV and 60 keV ion energy
  • < 50 nm lateral resolution
• Dual Source Column (DSC)
  • high current Cs⁺, O₂⁺, and Ar⁺ sources for sputtering
  • > 40 nA to > 1 µA beam current
  • 250 eV to 2 keV ion energy
• Gas Cluster Ion Beam (GCIB)
  • high current Ar_n⁺ source for depth profiling of large organic molecules
• Focused Ion Beam (FIB)
  • high current Ga⁺ (30 keV) source for fast FIB
  • imaging in cross section of very difficult samples
• Data Analysis:
  • complete data recording (mass, position and intensity)
  • data can be revisited anytime for additional analysis without further sample analysis
• Air-free Sample Transfer Capability:
  • air-free capsule available for sample transfer to and from user glove boxes
  • heating (up to 900 K) and cooling (down to 80 K) are available

Accepted Samples: metals, semiconductors, insulators, organic or inorganic, in solid or powder (needs to be pressed) form, fluid inclusions

Available Sputtering Species:

• Analysis Species: Bi₁⁺ (30 kV), Bi₃⁺ (30 kV), Bi₃⁺⁺ (60 kV), Ar_n⁺ cluster
• Sputtering Species: Cs⁺ or O₂⁺ (250 V to 2 kV), Ar_n⁺ cluster and Ga⁺

Fees and Policies

• UT Users: $65/hour
• Higher Education/State Agencies: $248/hour
• Corporate/External Users: $248/hour

Training

Users should register for the required in-person training course through UTLearn.