Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Instrument Capabilities

The SF-100 Lightning is a fast and flexible maskless sub-micron resolution lithography system which projects digital patterns directly onto photoresist, eliminating the need for physical photomasks. It provide rapid prototype of new designs and ideas without costly photomasks. It can also expose features over the entire area of the stage movement.

Features:

• LED exposure wavelengths: 365 nm, 385 nm, and 405 nm, compatible with most standard positive and negative photoresists.
• Large-area exposure with automatic stitching across the stage travel.
• Integrated CCD camera for live viewing, supporting auto focus and level-to-level alignment.
• Fully automated XYZ stage provides one-button operation and auto stitching for large substrates. 

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.