Equipment Type:

Cleanroom Instrumentation

Thin Film Fabrication

Instrument Capabilities

The Kurt J. Lesker PVD75 is a versatile thin-film deposition system designed for the deposition of metal and oxide films. The system supports multiple deposition techniques, including electron-beam (e-beam) evaporation, DC sputtering, and RF sputtering. This flexibility allows a wide range of materials to be deposited and provides researchers with control over film composition, thickness, and deposition conditions.

System Characteristics:

• Process control: Automated process control using eKLipse software
• Base pressure: 5.0 × 10⁻⁷ Torr
• Substrate handling:
• Substrate rotation up to 20 rpm
• Water-cooled substrate holder
• Pneumatically actuated substrate shutter
• Accommodates substrates up to 150 mm (6 inches) in diameter
• Film thickness monitoring: Two quartz crystal sensors for real-time film thickness monitoring
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E-Beam Evaporation

• E-beam source: 8-pocket source with 12 cc pockets
• Source shutter: Included
• Substrate-to-source distance: Approximately 15 inches
• Suitable for deposition of a wide range of metal and other evaporated films

Sputtering

• DC sputtering: Two DC sputtering sources, with capability for co-deposition
• RF sputtering: One RF sputtering source
• Substrate-to-source distance: Typically 4–6 inches, manually adjustable
• Operating pressure: Low-pressure operation down to ≥0.5 mTorr, depending on the material
• Targets: Accommodates non-magnetic targets up to 3 inches in diameter and 0.375 inches thick
• Tilt capability: Included for additional control of the deposition geometry
• Shutters: Included to reduce cross-contamination between materials
• Process gases: Up to four gases, with flow rates from 0–20 sccm

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Cleanroom Facility

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.