Equipment Type:

Metrology

Optical Profiles

Plasma Etching and Material Growth

Instrument Capabilities

The Hysitron TI 950 TriboIndenter is an automated nanomechanical test instrument used to quantitatively measure mechanical properties of materials such as hardness and elastic modulus. The system is equipped with a Berkovich tip.

Key features:

• Normal Displacement:
  • Vertical travel 50 mm
  • Indentation depth > 5 µm
  • Thermal drift 0.05 nm/s
• Normal Load:
  • Maximum load 12.373 mN
• High Load Transducer:
  • Maximum lateral force 5 N
  • Maximum scratch length 25 mm
  • Maximum normal force 2.8 N
  • Maximum normal displacement 80 µm
• Optical Microscope:
  • Optical objective 20X + digital zoom
  • Maximum field of view 772 x 588 µm
• X,Y,Z translation stage:
  • XY x Z travel 250 mm x 50 mm
• Commonly Used Advanced Modes
  • Nanoindentation: Quantitative material properties including hardness and modulus
  • Nanoscratch: Ramping/reciprocating force scratch for quantification of film delamination and friction
  • Scanning Wear: Quantifying wear resistance and wear volume

Fees and Policies

• UT Users: $15/hour
• Higher Education/State Agencies: $42/hour
• Corporate/External Users: $42/hour

Traning

Please contact Dr. Raluca Gearba to schedule a training session.