Equipment Type:

Nano and Micro Fabrication

Instrument Capabilities

The Hitachi IM4000C is an argon ion milling system which combines cross-section milling and flat milling in one instrument. It is used primarily for high-quality sample preparation for SEM, EBSD, and other surface/cross-sectional characterization. The system is connected to an argon glovebox to prepare sample cross sectional surfaces that can be air-free transferred using the Rox interface for analysis to either the XPS and/or TOFSIMS.

Key features:

• Up to 6 kV Argon ion energy.
• Sample size up to 25 mm x 50 mm.
• Stage movement of up 7 mm.
• Stage rotation during milling as well as tilting.
• Cross-sectioning using a mask.
• Maximum milling rate of 20 micron per hour for spot milling of Si.
• Maximum milling rate of 2 micron per hour for flat milling of Si for an area of 5 mm diameter.
• Maximum milling rate of 300 micron per hour for cross sections in Si.

Fees and Policies

• UT Users: $19/hour
• Higher Education/State Agencies: $58/hour
• Corporate/External Users: $57/hour

Traning

Please contact Dr. Hugo Celio to schedule a training session.