Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

HF Hood Use Requirements

This hood is dedicated exclusively to hydrofluoric acid (HF)-based processes. Users may operate the hood only after completing the required training.

General Requirement

• • Users are required to work in pairs when using the HF hood.
  • HF hood use is permitted only between 8:00 AM and 5:00 PM Monday - Friday.
  • Although there is no fee for using the HF hood, users must:
    • Reserve the hood through FBS before use.
    • Start the FBS timer when beginning their work.

The following chemical is approved for use in the TMI cleanroom HF hood:

• Buffered Oxide Etchant (BOE) from Transene, a mixture of ammonium hydrogen difluoride, hydrofluoric acid, and water.

Use of any other HF-containing chemical, mixture, or formulation requires prior approval from the facility manager.

Fees and Policies

Cleanroom Entry fee:

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

There are no fees associated with using the HF Hood, except the cleanroom entry fee.

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.