Equipment Type:

Cleanroom Instrumentation

Electrical Characterization Instrumentation

Electronic and Optoelectronic Testing

Information the Equipment Can Provide

The electrical characterization facility in TMI includes:

• Solar cells measuring setup
• The Karl Suss PM 5 Probe Station
• Two Agilent 4156C Semiconductor Parameter Analyzer
• A Keithley 4200-SCS Semiconductor Parameter Analyzer
• A four-point probe setup for measuring resistivity of materials

The Solar Cell Testing Setup Glovebox is incorporated into a nitrogen filled glovebox. The measurement setup includes:

• Keithley 2400 general purpose source meter
• Xenon lamp solar simulator (Newport) equipped with an AM1.5G filter. The light source intensity is calibrated using a Si photodiode (Hamamatsu, S1787-08) with certification traceable to NIST.
• External quantum efficiency (EQE) measurements can be performed using monochromatic light generated using a commercial monochromator (Newport Cornerstone 260 1/4M) chopped at 213 Hz and focused to a spot size of 1 mm diameter on the device active region. A lock-in-amplifier (Stanford Research Systems, model SR830) is used to measure EQE at given wavelength increments.
• Light intensity is calibrated using calibrated photodiodes of silicon (Hamamatsu) and germanium (Judson).

The Karl Suss PM5 Probe Station consists of a stereo microscope, a 6-inch vacuum chuck which allows single chips as well as up to 6-inch wafers to be probed, 4 micromanipulators, and a light tight enclosure. It can be coupled to various test equipment for device testing such as I-V measurements.

The Agilent 4156C Precision Semiconductor Parameter Analyzer is a highly accurate laboratory bench top solution for advanced device characterization. These are few of its main features:

• 4x High-resolution SMU, 2xVSU and 2xVMU
• Fill-in-the blanks front panel operation
• Includes Desktop EasyEXPERT software for PC-based GUI instrument control

The Keithley 4200-SCS Semiconductor Parameter Analyzer provides a total system solution for DC characterization of semiconductor devices and test structures. This advanced parameter analyzer provides intuitive and sophisticated capabilities for semiconductor device characterization. The 4200-SCS combines unprecedented measurement speed and accuracy with an embedded Windows NT- or XP based PC and the Keithley Interactive Test Environment (KITE) to provide a powerful single-box solution. Model 4200-SCS has:

• Four Source-Measure Units, including two high power SMUs with 1A/20W capability
• Two high power SMU’s with (200 V max) and two medium power SMU’s (20V max)
• Unique remote preamps extend the resolution of SMUs to 0.1fA
• Self-contained PC provides fast test setup, power data analysis, graphing and printing, and onboard mass storage of test results

Fees and Policies

• UT Users: $30/hour
• Higher Education/State Agencies: $38/hour
• Corporate/External Users: $38/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.

To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.