Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Acids Hood Use Requirements

The acids hood is primarily used to perform Piranha cleaning of substrates. Users should only use this hood only after receiving training.  Users are required to work in pairs and only between 8:00 Am and 5:00 PM.   Although there are no fees associated with the use of the HF hood, users should reserve the hood in FBS and start the timer.

Before using the acids hood make sure to attach to the hood the following signs:

• Piranha solution in use
• No other processes allowed at this time.

Never leave the Piranha solution unattended.

Acidic Piranha etch (or Piranha) is a mixture of varying ratios of concentrated sulfuric acid (typically 98% concentration) and hydrogen peroxide (usually 30% concentration) used to clean organic residues from substrates.

Never use hydrogen peroxide in higher concentrations.

Available chemicals:

• Sulfuric acid, CAS #7664-93-1
• Hydrogen peroxide, CAS #7722-84-1

The Acids Hood is also approved for etching metals such as Cr, Au, Ni, and Cu. Specific waste containers are available. Always check with the facility managers before bringing any etchants in the cleanroom. 

Fees and Policies

Cleanroom Entry fee:

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

There are no fees associated with using the HF Hood, except the cleanroom entry fee.

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.