Equipment Type:

Cleanroom Instrumentation

Nano and Micro Fabrication

Information the Equipment Can Provide

The Acids hood is primarily used to perform Piranha cleaning of substrates. Before using the acids hood make sure to attach to the hood the following signs:

• Piranha solution in use
• No other processes allowed at this time.
• Never leave Piranha solution unattended
• DO NOT USE THE PIRANHA HOOD WITHOUT PRIOR TRAINING
• Before using Piranha make sure appropriate waste containers are available

Acidic Piranha etch (or Piranha) is a mixture of varying ratios of concentrated sulfuric acid (typically 98% concentration) and hydrogen peroxide (usually 30% concentration) used to clean organic residues from substrates.

Never use hydrogen peroxide in higher concentrations.

• Sulfuric acid, CAS #7664-93-1
• Hydrogen peroxide, CAS #7722-84-1

Please read the SOP and MSDS for sulfuric acid and hydrogen peroxide before coming for the training session.

Fees and Policies

There are no fees associated with using the Acids hood, except the cleanroom entry fee.

Do not attempt to do any processes involving acids without prior training.

Acid based processes can be performed only between 8:00 AM to 5:00 PM, Monday through Friday.

Always work in pairs, reserve the Acids hood in FBS and start timer.

Facility User Education
To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.