Instrument Capabilities:

Several ovens are available in TMI's cleanroom. These ovens are primarily used for wafer dehydration, photoresist soft baking, post-exposure baking, and thermal annealing processes. They provide precise temperature control and uniform heating to ensure repeatable processing, improve photoresist adhesion, remove residual moisture, and support a wide range of microfabrication and materials research applications.

Isotemp Vacuum Oven, Model 281A, Fisher Scientific (Vac_Oven_2 in FBS)

• Vacuum range: 0 to 30 in.Hg
• Dial-in temperatures up to 280°C
• Temperature control +/-1°C
• Dimensions (DxWxH interior:11.5X10X10 in.)

Fees and Policies

There are no fees associated with using the Vacuum Ovens, except the cleanroom entry fee. ovens are available in TMI's cleanroom.

Cleanroom Entry fee

• UT Users: $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.

Instrument Capabilities

The AMOD PVD system is a resistive thermal evaporation system capable of depositing a wide range of materials, including metals and organic materials. The system is equipped with six evaporation sources, allowing for the deposition of multiple materials without requiring frequent source changes. Deposition rates and film thickness are monitored and controlled using quartz crystal rate sensors, providing precise control over the deposition process.

Key Features:

• The system operation is fully controlled by software
• Recipe based advanced multi-layer deposition control
• Sequential or co-deposition of materials
• Stainless steel isolation shields help to protect sources from cross contamination
• The system is integrated into MBraun glovebox system. The system access can be performed from both the inside of the glovebox or the outside

Fees and Policies

• UT Users: $35/hour
• Higher Education/State Agencies (Assisted): $92/hour
• Corporate/External Users (Assisted): $94/hour
• Higher Education/State Agencies (Unassisted): $64/hour
• Corporate/External Users (Unassisted): $65/hour

A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.

• UT Users $6
• Higher Education/State Agencies: $10
• Corporate/External Users: $10

Traning

Please contact Dr. Raluca Gearba to schedule a training session.

Information the Equipment Can Provide

The MiniFlex 600 is a fast, powerful, compact benchtop x-ray diffraction system. Its capabilities include identification of crystalline phases, crystallinity, crystallite size, crystal structure determination, air and moisture sensitive samples.

Fees and Policies

• UT Users: $7/hour
• Higher Education/State Agencies: $45/hour
• Corporate/External Users: $45/hour

To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.