Instrument Capabilities
The reactive ion etcher is capable of etching oxides, nitrides as well as remove organic contamination from sample surfaces. The unit is outfitted with 4 mass flow controllers for reproducible gas flow.
Key Features:
- AAvailable etch gases: CF₄, SF₆, O₂, and Ar.
- Electrode size: 6-inch.
- Maximum power: 600 W.
- Operating limit: Operate the system only up to 300 W. At 300 W, limit operation to 10 minutes at a time. For operation above 300 W, contact TMI staff for assistance.
Fees and Policies
- UT Users: $35/hour
- Higher Education/State Agencies (Assisted): $92/hour
- Corporate/External Users (Assisted): $94/hour
- Higher Education/State Agencies (Unassisted): $64/hour
- Corporate/External Users (Unassisted): $65/hour
A cleanroom entry fee will be charged in addition to the cleanroom facility usage fee.
- UT Users $6
- Higher Education/State Agencies: $10
- Corporate/External Users: $10
Traning
Users should register for the required in-person training course through UTLearn.



