Instrument Capabilities
The Keyence VK-X1100 Optical Profilometer is a high-resolution, non-contact laser scanning confocal microscope used to characterize the three-dimensional surface topography and morphology of materials. The system provides quantitative measurements of surface roughness, step heights, patterned features, and thin-film thickness, making it particularly useful for evaluating microfabrication, lithography, etching, and thin-film deposition processes.
Key features:
- 1024 × 768 pixel image resolution
- 404 nm laser for high-resolution surface measurements
- Fast scanning: measurement time of approximately [X] seconds per scan
- Lateral resolution: approximately 120 nm
- Z-resolution: approximately 6–8 nm
- Multiple Z-direction measurement steps for accurate three-dimensional surface reconstruction
- Non-contact optical measurement, minimizing the risk of damaging delicate surfaces
- Suitable for measuring surface roughness, step heights, patterned features, and thin-film thickness
- Sample considerations: measurements can be affected at transitions between glass and highly reflective surfaces, which may require appropriate sample preparation or measurement conditions.
Fees and Policies
- UT Users: $23/hour
- Higher Education/State Agencies: $56/hour
- Corporate/External Users: $56/hour
Traning
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