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Core Faculty

TMI's core faculty lead cutting-edge research by running their grants through the institute, fostering collaboration and resource sharing.

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Graduate Program

Our Materials Science and Engineering program is one of the best in the nation, and our graduates go on to be leaders in their fields.

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Research

TMI supports interdisciplinary research at UT Austin, with over 100 faculty focusing on clean energy, nanotechnology, and advanced materials using our state-of-the-art facilities.

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Cambridge Nanotech Savannah TM200 ALD

Instrument Capabilities

The Cambridge Nanotech Savannah TM200 is an atomic layer deposition (ALD) system designed to deposit thin, highly conformal films with precise thickness control. The system is well suited for applications including high-k dielectrics, passivation layers, barrier coatings, and transparent conductive oxides.

System Characteristics

  • Deposition temperature: 100–250 °C (low- to mid-temperature range)
  • Wafer capacity: Accommodates wafers up to 6 inches
  • Carrier gas: N₂ (nitrogen)

Available Precursors

The following precursors are currently available for use in the system:

  • Trimethylaluminum (TMA): Used for deposition of Al₂O₃ (aluminum oxide)
  • Tetrakis(methylamino)hafnium (TDMAH): Used for deposition of HfO₂ (hafnium oxide)
  • Water (H₂O): Used as the reactant/co-reactant for oxide deposition

Fees and Policies

Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)

  • UT Users: $6
  • Higher Education/State Agencies: $10
  • Corporate/External Users: $10

Cleanroom Facility

  • UT Users: $35/hour
  • Higher Education/State Agencies (Assisted): $92/hour
  • Corporate/External Users (Assisted): $94/hour
  • Higher Education/State Agencies (Unassisted): $64/hour
  • Corporate/External Users (Unassisted): $65/hour

Please contact Dr. Raluca Gearba and/or James Smitherman to schedule a training session.

Texas Materials Seminar Series

The Texas Materials Seminar Series features MSE 397 Seminars, TMI Distinguished Lectureships, and TMI Special Seminars, where leading faculty and professionals from around the world share cutting-edge innovations and advancements in materials engineering with our students.

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$12M+

In Grant Funding

20+

Research Patents

10K+

Sq. Ft. of Research Labs

News

Zhantao Chen Publishes New Article on AI-assisted Tool

Zhantao Chen, an Assistant Professor in Mechanical Engineering and a TMI-affiliate, has published an article on an AI tool in Nature Machine Intelligence. The article used AI to help researchers in ways that would assist in experimental tasks that are often labor-intensive and tiresome.

Read more …

Terry Zheng & Yu Group Publish New Work on Water-Based Electrolytes

Materials Science and Engineering graduate student Tianrui (Terry) Zheng, under the supervision of Dr. Guihua Yu has published research in Advanced Materials introducing a biphasic electrolyte architecture that combines the strengths of water-based (aqueous) and organic-based electrolytes for long-duration, high-rate zinc metal batteries.

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Get Better Sleep With Ultrasound Patch That Boosts REM Rest

A wearable bioelectronic device increased REM sleep in real-world trials, without invasive surgery or medication.

Published by UT News.

Yuebing Zheng Awarded 'New Directions' Seed Funding from UT OVPR

Yuebing Zheng was awarded seed funding through the University's Office of the Vice President for Research, Scholarship and Creative Endeavors. The 'New Directions in Research' grants are one time payments that give faculty an opportunity to obtain proof-of-concept or pilot data for future, larger grants.

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Terry Zheng Awarded UT Chevron Energy Graduate Fellowship

Tianrui (Terry) Zheng, a Materials Science & Engineering graduate student working with Dr. Guihua Yu, is a recipient of the 2026-2027 UT Chevron Energy Graduate Fellows Award from UT's Energy Institute.

Read more …