Information the Equipment Can Provide
The electrical characterization facility in TMI includes:
- Solar cells measuring setup
- The Karl Suss PM 5 Probe Station
- Two Agilent 4156C Semiconductor Parameter Analyzer
- A Keithley 4200-SCS Semiconductor Parameter Analyzer
- A four-point probe setup for measuring resistivity of materials
The Solar Cell Testing Setup Glovebox is incorporated into a nitrogen filled glovebox. The measurement setup includes:
- Keithley 2400 general purpose source meter
- Xenon lamp solar simulator (Newport) equipped with an AM1.5G filter. The light source intensity is calibrated using a Si photodiode (Hamamatsu, S1787-08) with certification traceable to NIST.
- External quantum efficiency (EQE) measurements can be performed using monochromatic light generated using a commercial monochromator (Newport Cornerstone 260 1/4M) chopped at 213 Hz and focused to a spot size of 1 mm diameter on the device active region. A lock-in-amplifier (Stanford Research Systems, model SR830) is used to measure EQE at given wavelength increments.
- Light intensity is calibrated using calibrated photodiodes of silicon (Hamamatsu) and germanium (Judson).
The Karl Suss PM5 Probe Station consists of a stereo microscope, a 6-inch vacuum chuck which allows single chips as well as up to 6-inch wafers to be probed, 4 micromanipulators, and a light tight enclosure. It can be coupled to various test equipment for device testing such as I-V measurements.
The Agilent 4156C Precision Semiconductor Parameter Analyzer is a highly accurate laboratory bench top solution for advanced device characterization. These are few of its main features:
- 4x High-resolution SMU, 2xVSU and 2xVMU
- Fill-in-the blanks front panel operation
- Includes Desktop EasyEXPERT software for PC-based GUI instrument control
The Keithley 4200-SCS Semiconductor Parameter Analyzer provides a total system solution for DC characterization of semiconductor devices and test structures. This advanced parameter analyzer provides intuitive and sophisticated capabilities for semiconductor device characterization. The 4200-SCS combines unprecedented measurement speed and accuracy with an embedded Windows NT- or XP based PC and the Keithley Interactive Test Environment (KITE) to provide a powerful single-box solution. Model 4200-SCS has:
- Four Source-Measure Units, including two high power SMUs with 1A/20W capability
- Two high power SMU’s with (200 V max) and two medium power SMU’s (20V max)
- Unique remote preamps extend the resolution of SMUs to 0.1fA
- Self-contained PC provides fast test setup, power data analysis, graphing and printing, and onboard mass storage of test results
Fees and Policies
Cleanroom Entry fee: (The cleanroom entry fee is charged in addition to the cleanroom facility usage fee)
- UT Users: $6
- Higher Education/State Agencies: $10
- Corporate/External Users: $10
Cleanroom Facility
- UT Users: $20/hour
- Higher Education/State Agencies: $90/hour
- Corporate/External Users: $95/hour
To become a new user of this facility, please read the Instrument Reservation Information page. If you are already a user you can make a reservation in FBS.
To become a user of this instrument you must first complete the Cleanroom Safety Class. Please contact the facility manager to schedule a training session.
